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Title:
LASER PROCESSING DEVICE, LASER PROCESSING METHOD, LASER BEAM DISTRIBUTION OBSERVING APPARATUS AND LASER BEAM DISTRIBUTION OBSERVING METHOD
Document Type and Number:
Japanese Patent JP2016193453
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser processing device, a laser processing method, a laser beam distribution observing apparatus and a laser beam distribution observing method capable of observing a distribution of laser beams induced by a liquid jet.SOLUTION: A laser beam distribution observing apparatus 26 includes: a shield plate 52 which is placed at a height relatively equal to a work-piece W (an object to be processed) with respect to a processing head 40, shields a liquid jet J and transmits a laser beam L induced by the liquid jet J; an imaging lens 56 which images the laser beam L transmitted by the shield plate 52; a photo-detector 58 which is placed on a conjugated position relation with the shield plate 52 with respect to the imaging lens 56 and receives the laser beam L imaged by the imaging lens 56; a signal processing unit 62 which acquires laser beam distribution image data exhibiting a distribution of the laser beam L on a contact surface of the liquid jet L with the shield plate 52 on the basis of an output signal outputted from the photo-detector 58; and a monitor 64 which displays laser beam distribution image data acquired by the signal processing unit 62.SELECTED DRAWING: Figure 1

Inventors:
HAYASHI HIROKAZU
Application Number:
JP2015256157A
Publication Date:
November 17, 2016
Filing Date:
December 28, 2015
Export Citation:
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Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B23K26/00; B23K26/066; B23K26/082; B23K26/146
Domestic Patent References:
JP5072691B22012-11-14
JP2011235347A2011-11-24
Foreign References:
DE102011102166A12012-11-22
US8859988B12014-10-14
WO2011004437A12011-01-13
Attorney, Agent or Firm:
Kenzo Matsuura