Title:
A laser beam machining device and a laser beam machining method
Document Type and Number:
Japanese Patent JP6272145
Kind Code:
B2
Abstract:
A laser processing device includes: a laser light source emitting laser light; a converging optical system converging the laser light at an object to be processed; a reflective spatial light modulator modulating the laser light such that the laser light is caused to branch into 0th order light and ±nth order light (n is a natural number) including at least first processing light and second processing light, and the first processing light is converged at a first converging point and the second processing light is converged at a second converging point; and a light blocking part blocking light to be converged at an outside with respect to the first processing light and the second processing light of the 0th order light and the ±nth order light to be converged at the object.
Inventors:
Takeshi Sakamoto
Yasunori Igasaki
Mamiko Matsunaga
Yasunori Igasaki
Mamiko Matsunaga
Application Number:
JP2014111321A
Publication Date:
January 31, 2018
Filing Date:
May 29, 2014
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
B23K26/53; B23K26/066; B23K26/067; H01L21/301
Domestic Patent References:
| JP201151011A | ||||
| JP2004322174A | ||||
| JP2008170366A | ||||
| JP2004337903A | ||||
| JP2004337902A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama