Title:
LASER PROCESSING SYSTEM MONITORING IMPURE GAS IN LASER OPTICAL PATH
Document Type and Number:
Japanese Patent JP2017056480
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser processing system which detects an impure gas mixing into a laser optical path with high accuracy even if oxygen concentration changes in the laser optical path.SOLUTION: A laser processing system includes: a laser oscillator 12; a laser optical path 15 which guides laser light 11 from the laser oscillator 12 to a workpiece 13; a purge gas supply line 18 which supplies a purge gas to the laser optical path 15; an oxygen sensor 36 and an impure gas sensor 34 installed in the laser optical path 15, the impure gas sensor 34 configured to detect an impure gas which affects propagation of the laser light; and an impure gas sensor output value correction part 40. The impure gas sensor output value correction part 40 corrects an output value of the impure gas sensor 34 on the basis of an output value of the oxygen sensor 36.SELECTED DRAWING: Figure 1
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Inventors:
IZUMI TAKASHI
Application Number:
JP2015184455A
Publication Date:
March 23, 2017
Filing Date:
September 17, 2015
Export Citation:
Assignee:
FANUC LTD
International Classes:
B23K26/00; B23K26/14; B23K26/70
Domestic Patent References:
| JP2004103633A | 2004-04-02 | |||
| JPH07209152A | 1995-08-11 | |||
| JP2002357576A | 2002-12-13 |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Hirose Shigeki
Tatsuki Sone
Masahiro Tahara
Tetsuro Shimada
Shinji Mitsuhashi
Hirose Shigeki
Tatsuki Sone
Masahiro Tahara