Title:
A laser beam microscope and a scanner
Document Type and Number:
Japanese Patent JP5950473
Kind Code:
B2
Inventors:
Haruhiko Kususe
Hirokazu Seki
Hirokazu Seki
Application Number:
JP2014121655A
Publication Date:
July 13, 2016
Filing Date:
June 12, 2014
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
G02B21/06
Domestic Patent References:
| JP2004515750A | ||||
| JP2002122553A | ||||
| JP2003294651A | ||||
| JP10282010A |
Foreign References:
| US20030156280 |
Attorney, Agent or Firm:
Kenjiro Oyama
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