Title:
LASER INTERFERENCE DEVICE
Document Type and Number:
Japanese Patent JP2023100358
Kind Code:
A
Abstract:
To provide a laser interference device that can reduce an influence caused by thermal expansion.SOLUTION: A laser interference device 1 comprises: a slider 3 that is movable in a predetermined measuring direction; a photoelectric microscope 5 that executes measurement processing on an object W arranged on the slider 3; a measurement reflection body 65 that is fixed to the slider 3; a reference reflection body 67 that is fixed to the photoelectric microscope 5; and a laser interferometer 63 that divides a laser beam output from a laser source into a measuring beam and a reference beam, causes the measuring beam to be emitted toward the measurement reflection body 65 along the measuring direction, causes the reference beam to be emitted toward the reference reflection body 67 along the measuring direction, and measures the interference light between the measuring beam reflected on the measurement reflection body 65 and the reference beam reflected on the reference reflection body 67.SELECTED DRAWING: Figure 1
Inventors:
YOKOYAMA YUICHIRO
Application Number:
JP2022000967A
Publication Date:
July 19, 2023
Filing Date:
January 06, 2022
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01B9/02; G01B11/00
Attorney, Agent or Firm:
Patent Attorney Corporation Kinoshita Intellectual Property Office