Title:
光学フィルター手段を有する測定試料へのレーザ光照射量調節機構及びこの機構を備えた熱定数測定装置
Document Type and Number:
Japanese Patent JP5041522
Kind Code:
B2
Inventors:
Akihiro Tsujimoto
Kenji Shimada
Dai Kuwahara
Youichi Takasaki
Kenji Shimada
Dai Kuwahara
Youichi Takasaki
Application Number:
JP2007148789A
Publication Date:
October 03, 2012
Filing Date:
June 05, 2007
Export Citation:
Assignee:
ULVAC RIKO, Inc.
International Classes:
G01N25/18
Domestic Patent References:
| JP9222404A | ||||
| JP2007040715A | ||||
| JP2000249670A | ||||
| JP7333144A | ||||
| JP2003065982A | ||||
| JP5025304B2 |
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka
Muranaka