Title:
Laser power and energy sensors using anisotropic thermoelectric materials
Document Type and Number:
Japanese Patent JP6316955
Kind Code:
B2
Abstract:
A laser-radiation sensor includes a copper substrate on which is grown an oriented polycrystalline buffer layer surmounted by an oriented polycrystalline sensor-element of an anisotropic transverse thermoelectric material. An absorber layer, thermally connected to the sensor-element, is heated by laser-radiation to be measured and communicates the heat to the sensor-element, causing a thermal gradient across the sensor-element. Spaced-apart electrodes in electrical contact with the sensor-element sense a voltage corresponding to the thermal gradient as a measure of the incident laser-radiation power. At least two protection layers are positioned between the sensor layer and the absorber layer.
Inventors:
Robert Emerald
Crow, Eric
Schloss, James
Crow, Eric
Schloss, James
Application Number:
JP2016527984A
Publication Date:
April 25, 2018
Filing Date:
February 25, 2014
Export Citation:
Assignee:
BOSTON SCIENTIFIC SCIMED,INC.
International Classes:
C01G3/00; G01J1/02; C01G51/00; H01L35/22; H01L37/02
Domestic Patent References:
| JP8247851A | ||||
| JP2011243824A | ||||
| JP2002289931A |
Foreign References:
| WO2011148425A1 | ||||
| WO2008056466A1 | ||||
| US5823682 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto
Previous Patent: Correlation with a reproduction device and reproduction cue
Next Patent: TOOL CLEANING MECHANISM FOR BONDER
Next Patent: TOOL CLEANING MECHANISM FOR BONDER