Title:
光塩基発生剤を含有する光イメージ化可能なポリオレフィン組成物
Document Type and Number:
Japanese Patent JP6513208
Kind Code:
B2
Abstract:
Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements.
Inventors:
Kandanara Chichi, Pramod
Rose, rally
Ing, Hendra
Chang, Way
Nap, Brian
Rose, rally
Ing, Hendra
Chang, Way
Nap, Brian
Application Number:
JP2017542905A
Publication Date:
May 15, 2019
Filing Date:
February 12, 2016
Export Citation:
Assignee:
Promelas, LLC
International Classes:
G03F7/038; C08F232/04; G03F7/004; G03F7/075; G03F7/20
Domestic Patent References:
| JP2015007770A | ||||
| JP2015018049A |
Foreign References:
| WO2014176490A1 |
Attorney, Agent or Firm:
Makoto Abe
Michiko Oi
Hiroaki Yamane
Michiko Oi
Hiroaki Yamane