Title:
光検出装置
Document Type and Number:
Japanese Patent JP7351610
Kind Code:
B2
Abstract:
A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stem connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stem.
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Inventors:
Yasuo Oyama
Katsumi Shibayama
Takashi Kasahara
Maki Hirose
Toshimitsu Kawai
Yumi Kuramoto
Katsumi Shibayama
Takashi Kasahara
Maki Hirose
Toshimitsu Kawai
Yumi Kuramoto
Application Number:
JP2018204156A
Publication Date:
September 27, 2023
Filing Date:
October 30, 2018
Export Citation:
Assignee:
Hamamatsu Photonics K.K.
International Classes:
G02B5/28; G01J3/26; G02B26/00
Domestic Patent References:
| JP2013072930A | ||||
| JP8128891A | ||||
| JP5322653A | ||||
| JP2013026518A | ||||
| JP2014071400A |
Foreign References:
| WO2016175089A1 | ||||
| WO2018159533A1 | ||||
| WO2018030486A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama