Title:
A light flux conversion element, an illumination optical device, an exposure device, and an exposure method
Document Type and Number:
Japanese Patent JP5967132
Kind Code:
B2
Abstract:
A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction.
Inventors:
Mitsunori Toyota
Application Number:
JP2014096136A
Publication Date:
August 10, 2016
Filing Date:
May 07, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B5/18; G02B5/30; G02B19/00; G02B27/00; G02B27/28; G02B27/44; H01L21/027
Domestic Patent References:
| JP63044726A | ||||
| JP6120110A | ||||
| JP7057992A | ||||
| JP9184918A | ||||
| JP2006269462A | ||||
| JP2010226117A |
Foreign References:
| WO2001035451A1 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani