A light flux conversion element, an illumination optical device, an exposure device, and an exposure method

Japanese Patent JP5983689

B2

A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction.

JP2002500809	INDUSTRIAL APPLICABILITY An electronic source having a shielded cathode
JPH11354413	METHOD AND DEVICE FOR PROJECTION ALIGNMENT
JP2004265634	MANUFACTURING METHOD OF PLASMA DISPLAY PANEL

Mitsunori Toyota

JP2014158994A

September 06, 2016

August 04, 2014

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NIKON CORPORATION

G03F7/20; G02B19/00; G02B27/00; G02B27/28; G02B27/44; H01L21/027

JP2014003305A
JP7057993A
JP7161622A
JP7230945A
JP2003090978A
JP7057992A
JP2002162655A
JP7183201A
JP4976015B2
JP4976094B2
JP5696746B2
JP5731591B2
JP2014195094A

WO2000067303A1
WO2001035451A1

Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani

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