Title:
光照射装置及び露光装置
Document Type and Number:
Japanese Patent JP6529809
Kind Code:
B2
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Inventors:
Masashi Saito
Kentaro Murakami
Ichiyo Kotani
Kakizaki Yukio
Kentaro Murakami
Ichiyo Kotani
Kakizaki Yukio
Application Number:
JP2015082894A
Publication Date:
June 12, 2019
Filing Date:
April 14, 2015
Export Citation:
Assignee:
Therma Precision Co., Ltd.
International Classes:
G03F7/20; G02B3/00; G02B19/00
Domestic Patent References:
| JP2007299966A | ||||
| JP2012063390A | ||||
| JP2014002212A | ||||
| JP2004335949A | ||||
| JP2014006433A | ||||
| JP2014207300A | ||||
| JP2008529037A | ||||
| JP2014003086A | ||||
| JP2014186146A |
Attorney, Agent or Firm:
Patent business corporation Tsukuni