Title:
光変調型センサおよびこのセンサを用いたプロセス計測装置
Document Type and Number:
Japanese Patent JP3577349
Kind Code:
B2
Abstract:
An optical-modulation-type sensor comprises an input condenser lens for collecting light from a light source, a polarizer for linearly polarizing the light from the input condenser lens, a light-transmissive piezo-oscillator which is provided with an oscillator circuit and to which the linearly polarized light is introduced from the polarizer, an analyzer for linearly polarizing the light from the piezo-oscillator, and an output condenser lens for converging the linearly polarized light from the analyzer. A process instrumentation apparatus using the sensor of the structure described above further comprises an optical fiber for transmitting the light from the light source to the optical-modulation-type sensor, a photoelectric converter operatively connected to an output side of the optical-modulation-type sensor for converting to an electrical signal the transmitted light which is intensity modulated with the oscillation frequency of the piezo-oscillator, and a signal processing unit for acquiring a process quantity based on the frequency of an output signal from the photoelectric converter.
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Inventors:
Masaki Yoda
Maekawa standing
Maekawa standing
Application Number:
JP32599694A
Publication Date:
October 13, 2004
Filing Date:
December 27, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01D5/26; G01D5/353; G01K7/32; G01L1/24; G01L11/02; G02F1/01; G02F1/03; (IPC1-7): G02F1/01; G01D5/26; G02F1/03
Domestic Patent References:
| JP2262067A | ||||
| JP61073037A |
Attorney, Agent or Firm:
Hisashi Hatano
Shunguchi Sekiguchi
Shunguchi Sekiguchi