Title:
LIGHT SOURCE DEVICE
Document Type and Number:
Japanese Patent JP2023149175
Kind Code:
A
Abstract:
To provide a light source device capable of improving the luminous efficiency of plasma generated by an energy beam.SOLUTION: A light source device according to an embodiment of the present invention transforms a liquid raw material into plasma by an energy beam to take out radiation, and comprises a rotor, a raw material supply part, and an electric field application part. The rotor is arranged at an incident position of the energy beam. The raw material supply part supplies the liquid raw material to the rotor. The electric field application part applies an electric field to a plasma generating region which is set to an electric potential different from the liquid raw material supplied to the rotor and where plasma is generated by irradiation of the energy beam.SELECTED DRAWING: Figure 1
Inventors:
TERAMOTO YUSUKE
Application Number:
JP2022057606A
Publication Date:
October 13, 2023
Filing Date:
March 30, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
G03F7/20; G03F1/84; H05G2/00
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office