Title:
照明装置、光学装置、インプリント装置、投影装置、及び物品の製造方法
Document Type and Number:
Japanese Patent JP6674306
Kind Code:
B2
Abstract:
The present invention provides an illumination apparatus which performs oblique illumination, the apparatus including a first optical element formed with an array of a plurality of optical components each configured to generate a point light source, and a second optical element configured to receive light from the first optical element and form an illumination region, with a power thereof in one direction being different from a power thereof in a direction perpendicular to the one direction, wherein at least one of the first optical element and the second optical element has a rotation angle about an optical axis thereof so as to perform compensate for distortion of the illumination region by the oblique illumination.
Inventors:
Takafumi Miyaharu
Kenichiro Shinoda
Takahiro Matsumoto
Kazuhiro Sato
Kenichiro Shinoda
Takahiro Matsumoto
Kazuhiro Sato
Application Number:
JP2016073177A
Publication Date:
April 01, 2020
Filing Date:
March 31, 2016
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02; G02B19/00
Domestic Patent References:
| JP2005189847A | ||||
| JP2006065118A | ||||
| JP2013102132A |
Foreign References:
| US20160046045 |
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu