Title:
照明装置、処理装置、及びデバイス製造方法
Document Type and Number:
Japanese Patent JPWO2013179977
Kind Code:
A
Inventors:
Taketoshi Negishi
Fukui Tatsuo
Fukui Tatsuo
Application Number:
JP2013064228
Publication Date:
January 21, 2016
Filing Date:
May 22, 2013
Export Citation:
Assignee:
NIKON CORP.
International Classes:
G02F1/13; G02B19/00; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Norio Takahashi
Norio Takahashi