Title:
照明方法、照明光学装置、及び露光装置
Document Type and Number:
Japanese Patent JP5807761
Kind Code:
B2
Abstract:
There is provided an illumination method for illuminating an illumination objective surface by using a light from a light source. The illumination method includes setting control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light; illuminating the illumination objective surface with the light from the light source via the plurality of optical elements; monitoring integrated energy of the light from the light source; and correcting the control amount for the plurality of optical elements on the basis of a result of the monitoring of the integrated energy.
Inventors:
Kyoji Mizuno
Application Number:
JP2013519344A
Publication Date:
November 10, 2015
Filing Date:
November 30, 2011
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP201034553A | ||||
| JP2009177176A | ||||
| JP2008109132A | ||||
| JP2005189403A | ||||
| JP2004289123A |
Foreign References:
| WO2012160728A1 |
Attorney, Agent or Firm:
Satoshi Omori