Title:
液状物質吐出ヘッド及び液状物質吐出装置
Document Type and Number:
Japanese Patent JP5165976
Kind Code:
B2
Inventors:
Kiyoaki Shirakawa
Application Number:
JP2007239648A
Publication Date:
March 21, 2013
Filing Date:
September 14, 2007
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
F04B9/04; F04B13/00
Domestic Patent References:
JP2005016368A | ||||
JP2003254230A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu