Title:
強誘電体薄膜形成用液状組成物および強誘電体薄膜の製造方法
Document Type and Number:
Japanese Patent JPWO2004097854
Kind Code:
A
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Inventors:
Yoshihisa Beppu
Hiroyuki Tomonaga
Sandy plain Kazuo
Hiroyuki Tomonaga
Sandy plain Kazuo
Application Number:
JP2004005913W
Publication Date:
November 11, 2004
Filing Date:
April 23, 2004
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
C04B35/00; C04B35/49; C04B35/46; H01L21/316; C01G23/00; C01G25/00
Attorney, Agent or Firm:
Toshiharu Ogawa
Yamamoto Ryozo
Spring name Kenji
Yamamoto Ryozo
Spring name Kenji
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