Title:
A liquid feeder and a substrate processing device
Document Type and Number:
Japanese Patent JP6091976
Kind Code:
B2
Inventors:
Ryuichi Kosuga
Umemoto Masao
Nakano Eijiro
Chuichi Sone
Umemoto Masao
Nakano Eijiro
Chuichi Sone
Application Number:
JP2013089254A
Publication Date:
March 08, 2017
Filing Date:
April 22, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01L21/304; B24B37/04
Domestic Patent References:
| JP10098017A | ||||
| JP2011035128A | ||||
| JP2011187891A | ||||
| JP2007301661A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida