Title:
トップコート組成物及び該組成物を使用する液浸リソグラフィ法
Document Type and Number:
Japanese Patent JP5410792
Kind Code:
B2
Abstract:
A top-coat composition comprising a non-self imageable polymer consisting of norbornene-type repeating units, said polymer comprising a first norbornene-type repeating unit represented by Formula I:
where X is -CH 2 -, -CH 2 CH 2 -, O or S; n is an integer from 0 to 5 inclusive; each of R 1 to R 4 independently represents hydrogen, a linear or branched alkyl group, or a linear or branched haloalkyl group, subject to the proviso that at least one of R 1 to R 4 is a -QNHSO 2 R 5 group where Q is a linear or branched alkyl spacer of 1 to 5 carbons, and R 5 is a perhalo group of 1 to 10 carbon atoms, a solvent and optionally comprising one or more of a crosslinking agent, an acidic material or a surfactant.
Inventors:
Rose, Larry, F.
Chan, Chun
Kandanarashichi, Pramod
Seger, Lawrence, Dee.
Keita Ishizuka
Kotaro Endo
Tomoyuki Ando
Chan, Chun
Kandanarashichi, Pramod
Seger, Lawrence, Dee.
Keita Ishizuka
Kotaro Endo
Tomoyuki Ando
Application Number:
JP2009061467A
Publication Date:
February 05, 2014
Filing Date:
March 13, 2009
Export Citation:
Assignee:
Promelas, LLC
Tokyo Ohka Kogyo Co., Ltd.
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C09D123/24; G03F7/039; G03F7/11; G03F7/38; H01L21/027; C08F232/08
Domestic Patent References:
| JP2003525311A |
Foreign References:
| WO2005088397A1 | ||||
| WO2000046268A1 |
Attorney, Agent or Firm:
Masayuki Masabayashi