Title:
ノルボルネン系ポリマー、その組成物、及び該組成物を使用するリソグラフィ法
Document Type and Number:
Japanese Patent JP2008536956
Kind Code:
A
Abstract:
A top-coat composition comprising a non-self imageable polymer consisting of norbornene-type repeating units, said polymer comprising a first norbornene-type repeating unit represented by Formula I:
where X is -CH 2 -, -CH 2 CH 2 -, O or S; n is an integer from 0 to 5 inclusive; each of R 1 to R 4 independently represents hydrogen, a linear or branched alkyl group, or a linear or branched haloalkyl group, subject to the proviso that at least one of R 1 to R 4 is a -QNHSO 2 R 5 group where Q is a linear or branched alkyl spacer of 1 to 5 carbons, and R 5 is a perhalo group of 1 to 10 carbon atoms, a solvent and optionally comprising one or more of a crosslinking agent, an acidic material or a surfactant.
Inventors:
Rose, Larry, F.
Chan, Chun
Kandanarashichi, Pramod
Seger, Lawrence, Dee.
Keita Ishizuka
Kotaro Endo
Tomoyuki Ando
Chan, Chun
Kandanarashichi, Pramod
Seger, Lawrence, Dee.
Keita Ishizuka
Kotaro Endo
Tomoyuki Ando
Application Number:
JP2007557081A
Publication Date:
September 11, 2008
Filing Date:
February 21, 2006
Export Citation:
Assignee:
Promelas, LLC
Tokyo Ohka Kogyo Co., Ltd.
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C08F32/08; G03F7/004; G03F7/039; G03F7/11; G03F7/20; G03F7/38; H01L21/027
Domestic Patent References:
| JP2002538273A | 2002-11-12 | |||
| JP2006133716A | 2006-05-25 | |||
| JP2005196209A | 2005-07-21 | |||
| JP2007525696A | 2007-09-06 | |||
| JP2005097595A | 2005-04-14 | |||
| JP2003525311A | 2003-08-26 |
Foreign References:
| WO2000046268A1 | 2000-08-10 |
Other References:
JPN6010060232; 高分子学会編集: 高分子工学講座４ 化学繊維の紡糸とフィルム成形（Ｉ） , 1968, 第１６０頁-第１６１頁, 株式会社地人書館
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori