Title:
低比誘電性絶縁膜及びその形成方法並びに層間絶縁膜
Document Type and Number:
Japanese Patent JP4076245
Kind Code:
B2
Inventors:
Masayuki Iijima
Masatoshi Sato
Sadayuki Ukishima
Yoshikazu Takahashi
Masatoshi Sato
Sadayuki Ukishima
Yoshikazu Takahashi
Application Number:
JP11022997A
Publication Date:
April 16, 2008
Filing Date:
April 11, 1997
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G03F7/038; H01L21/312; C08G18/02; C08G18/32; C08G71/02; G03F7/16; H01L21/768; H01L23/522
Domestic Patent References:
| JP9008181A | ||||
| JP8148838A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe