Title:
振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
Document Type and Number:
Japanese Patent JP4287213
Kind Code:
B2
Abstract:
Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector (503), a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor (103) by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor (103) by the reciprocal of the mass of the rotor (103). The result of this calculation is reversed in polarity and is added to the output of a compensator (201) by an adder (505).
Inventors:
Yoshinobu Otachi
Fukami Hideo
Namiki
Fukami Hideo
Namiki
Application Number:
JP2003207729A
Publication Date:
July 01, 2009
Filing Date:
August 18, 2003
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D29/056; F16C32/04; F04D19/04; F04D29/04; F04D29/046; F04D29/048; F04D29/66; F16C39/06; H02K7/09
Domestic Patent References:
| JP2002188679A | ||||
| JP6032787U | ||||
| JP60220219A | ||||
| JP62258219A | ||||
| JP7259853A | ||||
| JP9120301A | ||||
| JP2002147454A | ||||
| JP7259854A | ||||
| JP7019243A |
Foreign References:
| US4999534 | ||||
| US5202824 | ||||
| US5306975 |
Attorney, Agent or Firm:
Masatoshi Shiina