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Title:
A magnetic fluid bearing device and a vacuum chamber
Document Type and Number:
Japanese Patent JP6274856
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum chamber and a magnetic fluid bearing device capable of accepting a load in a superior manner even if a radial load accompanied with a deflection angle is applied under a relative spherical surface motion between an inner member and an outer member and capable of holding a clearance between each of the members.SOLUTION: The present invention relates to a magnetic fluid bearing device comprising an inner member 1 and an outer member 2 that is rotatably applied over the inner member 1 with their axial directions being aligned to each other. A plurality of rollers 5 are arranged between a spherical convex outer peripheral surface 3 of the inner member 1 and an inner peripheral surface 4 of the outer member 2 of spherical concave surface opposing against the spherical convex surface, the inner member 1 and the outer member 2 are constituted in such a manner that they can perform a relative spherical surface motion along the spherical convex surface and the spherical concave surface and there is provided a magnetic fluid seal for sealing a curved clearance curved to protrude outward and formed between the inner member 1 and the outer member 2.

Inventors:
Takahashi Teiji
Ryota Goto
Application Number:
JP2013265371A
Publication Date:
February 07, 2018
Filing Date:
December 24, 2013
Export Citation:
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Assignee:
Canon Tokki Co., Ltd.
International Classes:
F16C23/04; F16C33/74; F16J15/43
Domestic Patent References:
JP57159023U
JP6061518U
JP10220595A
JP738819U
JP2000192953A
JP2009299176A
JP2145990U
JP8320017A
JP4818637A
JP49135050A
Foreign References:
US4060287
Attorney, Agent or Firm:
Tsuyoshi Yoshii
Masae Yoshii



 
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