Title:
A magnetism sensing device and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6222351
Kind Code:
B2
Abstract:
An object is to provide a magnetic detection device that can be reduced in size and thickness. The magnetic detection device (1) of the present invention comprises: a substrate (S); and a first magneto-impedance element (MI element) disposed at one surface side of the substrate and comprising a first magneto-sensitive wire (W1) and a first detection coil (C1). The first magneto-sensitive wire senses an external magnetic field component in a first axis direction in which the first magneto-sensitive wire extends. The first detection coil loops around the first magneto-sensitive wire. The first detection coil according to the present invention comprises a left-side coil part (C11) and a right-side coil part (C12) that coexist along the first magneto-sensitive wire, and is provided with a magnetic field direction changing body (F1) composed of a soft magnetic material of which at least a part is disposed at another surface side of the substrate or in the substrate above an intermediate position between the left-side coil part and the right-side coil part. The magnetic field direction changing body is able to change an external magnetic field component in a third axis direction intersecting the substrate to a measurement magnetic field component in the first axis direction. The external magnetic field component in the third axis direction is able to be detected on the basis of a left-side output obtained from the left-side coil part and a right-side output obtained from the right-side coil part.
Inventors:
Michiharu Yamamoto
Tomohiko Nagao
Tomohiko Nagao
Application Number:
JP2016517833A
Publication Date:
November 01, 2017
Filing Date:
March 12, 2015
Export Citation:
Assignee:
Aichi Steel Co., Ltd.
International Classes:
G01R33/02; G01C17/30; H01L43/00
Domestic Patent References:
| JP63152185A | ||||
| JP10022545A | ||||
| JP2010101648A | ||||
| JP5066576B2 | ||||
| JP2008134236A | ||||
| JP2014153309A | ||||
| JP48014275U | ||||
| JP2001013231A |
Foreign References:
| WO2010110456A1 | ||||
| US20130106410 | ||||
| US20060164080 |
Attorney, Agent or Firm:
Morioka Masayuki
Sansui International Patent Office
Sansui International Patent Office