Title:
A manufacture device of a carbon nanotube
Document Type and Number:
Japanese Patent JP6234298
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a production apparatus of carbon nanotubes, with which lengths of the carbon nanotubes and thickness of an amorphous layer are accurately controlled.SOLUTION: In a production apparatus 1 of carbon nanotubes 3, which has a pressure-reduced reaction vessel 5, having a first CVD temperature region A4 to grow the carbon nanotubes 3 to a predetermined length by heating a surface of a substrate 2 to the first CVD temperature, and further a second CVD temperature region A5 to make carbon adhere to the surface of the carbon nanotubes 3 by heating the surface of the substrate 2 to the second CVD temperature higher than the first CVD temperature, provided in a direction of movement of the substrate 2, in the first CVD temperature region A4 and the second CVD temperature region A5, a first space partition 22A and a second space partition 22B to limit reaction spaces P1, P2 by covering the surface of the substrate 2 are respectively arranged, and a heat shielding member 27 is arranged between the first space partition 22A and the second space partition 22B.
Inventors:
Iwao Sugimoto
Hiroshi Tatsumi
Kenji Ishiguro
High Nabe Koji
Hiroshi Tatsumi
Kenji Ishiguro
High Nabe Koji
Application Number:
JP2014067313A
Publication Date:
November 22, 2017
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Hitachi Zosen Corporation
International Classes:
C01B32/164; B82Y40/00; H01M4/88
Domestic Patent References:
| JP2013032248A | ||||
| JP2011195371A | ||||
| JP2001032071A | ||||
| JP2013006708A | ||||
| JP2007257886A | ||||
| JP2011076864A | ||||
| JP2006225199A | ||||
| JP2010126412A |
Foreign References:
| WO2010001791A1 |
Attorney, Agent or Firm:
Morimoto International Patent Office
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