Title:
【発明の名称】超純水の製造装置、製造方法及び製造装置の制御方法
Document Type and Number:
Japanese Patent JP2902511
Kind Code:
B2
Abstract:
An apparatus for producing ultrapure water includes a cation exchange resin tower, a decarbonation tower, an anion exchange resin tower, and a pH adjustor for changing the zeta potential of the impurities contained in water. The pH value is adjusted to aggregate or ionize the impurities. The apparatus can be controlled so that the treated water is introduced into a reverse osmosis unit or an oxidation tower and an after reverse osmosis unit according to the quality of the treated water.
Inventors:
BAN KOJI
FUKUMOTO HAYAAKI
FUKUMOTO HAYAAKI
Application Number:
JP34111091A
Publication Date:
June 07, 1999
Filing Date:
December 24, 1991
Export Citation:
Assignee:
MITSUBISHI DENKI KK
International Classes:
B01D61/02; B01J39/04; B01J47/14; C02F1/42; C02F1/44; C02F1/52; B01D61/04; C02F1/72; C02F9/00; G05D21/02; (IPC1-7): C02F1/42; C02F1/44; C02F1/52; C02F1/72; C02F9/00; B01D61/04
Domestic Patent References:
| JP2207888A | ||||
| JP6019091A | ||||
| JP54085A |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)