Title:
インライン型基板処理装置の製造システム及び製造方法
Document Type and Number:
Japanese Patent JP5583935
Kind Code:
B2
Inventors:
Yoshikatsu Kaneda
山仁 Takafumi
山仁 Takafumi
Application Number:
JP2009190281A
Publication Date:
September 03, 2014
Filing Date:
August 19, 2009
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B65G49/06; B65G7/06; H01L21/02; H01L21/027; H01L21/677
Attorney, Agent or Firm:
Makoto Onda
Hironori Onda
Hironori Onda