Title:
A manufacturing method of a MEMS element
Document Type and Number:
Japanese Patent JP5973792
Kind Code:
B2
Inventors:
Hiroshi Takahashi
Yosuke Ochiai
Takao Fukudome
Takahide Usui
Tag
Kenji Narita
Hiroki Okada
Yosuke Ochiai
Takao Fukudome
Takahide Usui
Tag
Kenji Narita
Hiroki Okada
Application Number:
JP2012124957A
Publication Date:
August 23, 2016
Filing Date:
May 31, 2012
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
B81C1/00; B81B3/00; H04R31/00
Domestic Patent References:
| JP2000058866A | ||||
| JP2009060600A |
Foreign References:
| US20100158279 | ||||
| US20080104825 |
Attorney, Agent or Firm:
Yasuto Ogata