PRODUCTION METHOD OF CYCLIC HYDROGENATED SILANE COMPOUND

Title:

PRODUCTION METHOD OF CYCLIC HYDROGENATED SILANE COMPOUND

Document Type and Number:

Japanese Patent JP2017095324

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a production method with which a cyclic hydrogenated silane compound, used for application of a hydrogenated polysilane in a production of thin film silicon as an alternative to a vapor deposition method (CVD method) using monosilane as a raw material, is efficiently produced.SOLUTION: A production method of a cyclic hydrogenated silane compound has: a step to obtain a cyclic halosilane compound represented by formula (1) by bringing a salt of the cyclic halosilane compound and a Lewis acid compound into contact with each other; and a step to reduce the cyclic halosilane compound by bringing it into contact with a metal hydride. To be more specific, in the method, a white solid including a phosphonium salt of tridecachlorohydrocyclohexasilane dianion or the like is obtained by a cyclization coupling reaction of trichlorosilane, the cyclic halosilane compound Si6Cl12 is obtained by making the white solid and powdery aluminum chloride react with each other in a benzene solvent, and cyclohexasilane is produced by bringing the cyclic halosilane compound into contact with lithium aluminum hydride.SELECTED DRAWING: None

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Inventors:

ABE TAKESHI

Application Number:

JP2015231143A

Publication Date:

June 01, 2017

Filing Date:

November 26, 2015

Export Citation:

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Assignee:

NIPPON CATALYTIC CHEM IND

International Classes:

C01B33/04

Domestic Patent References:

JP2014012647A	2014-01-23
JPH11171528A	1999-06-29

Other References:

TILLMANN JAN, ET AL.: "Lewis Acidity of Si6Cl12 and Its Role as Convenient SiCl2 Source", INORGANIC CHEMISTRY, vol. 54(19), JPN6019021120, 5 October 2015 (2015-10-05), pages 9611 - 9618, ISSN: 0004050355
HENGGE E. AND KOVAR D.: "Preparation of Cyclohexasilane, Si6H12", ANGEW. CHEM. INT. ED. ENGL., vol. 16, JPN6019021122, 1977, pages 403, ISSN: 0004050356

Attorney, Agent or Firm:

Kyuichi Ueki
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Yukari Shibata

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