Title:
被エッチング基体の製造方法
Document Type and Number:
Japanese Patent JP5404028
Kind Code:
B2
Inventors:
Toshiya Takagi
Teruhiro Uematsu
桃澤 Aya
Teruhiro Uematsu
桃澤 Aya
Application Number:
JP2008331082A
Publication Date:
January 29, 2014
Filing Date:
December 25, 2008
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO., LTD.
International Classes:
G03F7/038; G03F7/027; G03F7/40; G03F7/42
Attorney, Agent or Firm:
Right wood Masayuki