Title:
CATHODE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2017123343
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cathode and a method of manufacturing the same capable of suppressing nonuniformity of an electric field at a cathode tip.SOLUTION: The cathode has a conical shape whose tip of an upper part is flat or spherical. The upper part includes: a cathode body having an electron emission surface disposed at the tip and a conical surface disposed below the electron emission surface; and a coating layer made of carbon and having an opening exposing the electron emission surface and covering the conical surface with a groove interposed therebetween. A width of the groove is 1 μm or more and 10 μm or less. A difference between the maximum value and the minimum value of the width of the groove around the electron emission surface is 1 μm or less.SELECTED DRAWING: Figure 1
Inventors:
KOBAYASHI YOSHIE
Application Number:
JP2017045948A
Publication Date:
July 13, 2017
Filing Date:
March 10, 2017
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC
International Classes:
H01J1/20; H01J37/06
Domestic Patent References:
| JPS6147038A | 1986-03-07 | |||
| JP2003022780A | 2003-01-24 | |||
| JP2012069364A | 2012-04-05 |
Foreign References:
| WO2008120412A1 | 2008-10-09 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office
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