Title:
化合物、樹脂、レジスト組成物及びレジストパターンの製造方法
Document Type and Number:
Japanese Patent JP6389741
Kind Code:
B2
Inventors:
Isao Yoshida
Koji Ichikawa
Koji Ichikawa
Application Number:
JP2014238522A
Publication Date:
September 12, 2018
Filing Date:
November 26, 2014
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C08F222/10; C08F22/10; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
JP2000241976A | ||||
JP2014010269A | ||||
JP2010077404A | ||||
JP2013105165A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation