化合物、樹脂、レジスト組成物及びレジストパターンの製造方法

Title:

化合物、樹脂、レジスト組成物及びレジストパターンの製造方法

Document Type and Number:

Japanese Patent JP6395564

Kind Code:

B2

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Inventors:

Masashi Yoshida
Shota Nakano
Koji Ichikawa

Application Number:

JP2014228566A

Publication Date:

September 26, 2018

Filing Date:

November 11, 2014

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C08F222/10; C08F22/10; G03F7/004; G03F7/039; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Shinki Global IP Patent Corporation

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