Title:
The manufacturing method and compound of a substrate in which the constituent for film formation, the film, and the pattern were formed
Document Type and Number:
Japanese Patent JP6248865
Kind Code:
B2
Inventors:
Shinya Nakato
Takeshi Wakamatsu
Abe Tsubasa
Kazunori Sakai
Takeshi Wakamatsu
Abe Tsubasa
Kazunori Sakai
Application Number:
JP2014170881A
Publication Date:
December 20, 2017
Filing Date:
August 25, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08G65/38; C07C43/23; C07C255/54; C08F12/00; C08F38/00; G03F7/11
Domestic Patent References:
| JP2005128509A | ||||
| JP2006058427A | ||||
| JP9090624A | ||||
| JP9090625A | ||||
| JP2006063236A | ||||
| JP2000159715A |
Foreign References:
| WO2014156910A1 |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka