Title:
複合型圧力計、及び複合型圧力計の製造方法
Document Type and Number:
Japanese Patent JP5349366
Kind Code:
B2
Abstract:
The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products and mass production. According to an embodiment of the present invention, the manufacturing method of a combined type pressure gauge is a manufacturing method of a combined type pressure gauge including a capacitive diaphragm pressure gauge and a Pirani pressure gauge, the method including a groove-forming step of forming a first groove portion and a second groove portion on a first surface side of a silicon substrate by etching, and a bonding step to bond a glass substrate to the silicon substrate so as to cover the first groove portion and the second groove portion on the first surface side of the silicon substrate.
Inventors:
Miyashita jizo
Application Number:
JP2010041197A
Publication Date:
November 20, 2013
Filing Date:
February 26, 2010
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L9/00; G01L21/12
Domestic Patent References:
| JP2008209284A | ||||
| JP2010014527A |
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto
Sayori Seto