Title:
PRODUCTION METHOD OF FINE METAL MASK USING ELECTROCASTING PLATING METHOD
Document Type and Number:
Japanese Patent JP2017226918
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a production method of a fine metal mask using an electrocasting plating method.SOLUTION: A production method of a fine metal mask using an electrocasting plating method of the present invention includes: a step of vapor depositing a sacrificial layer on a carrier glass; a step of forming an electrode layer by vapor depositing an electrode metal; a step of coating a photoresist on the electrode layer; a step of patterning the photoresist using optical lithography; a step of forming an electrocasting plating layer on the patterned photoresist; a step of forming a metal pattern by removing the photoresist; a step of forming a mask pattern on the electrode layer; a step of heat treating the electrocasting plating layer and the electrode layer; a step of inspecting the electrocasting plating layer and the electrode layer; and a step of separating the electrocasting plating layer and the electrode layer from the carrier glass, and largely improves a loosening phenomenon and a distortion phenomenon, and can produce the fine metal mask having high accuracy of 40 μm or smaller pitch.SELECTED DRAWING: Figure 3
Inventors:
KIN CHIU
PARK JONG-KAB
SHIN HEUNG HYUN
PARK JONG-KAB
SHIN HEUNG HYUN
Application Number:
JP2017122777A
Publication Date:
December 28, 2017
Filing Date:
June 23, 2017
Export Citation:
Assignee:
AP SYSTEMS INC
International Classes:
C25D1/10
Domestic Patent References:
| JP2005212476A | 2005-08-11 | |||
| JP2013096009A | 2013-05-20 | |||
| JP2012253244A | 2012-12-20 | |||
| JP2014065948A | 2014-04-17 | |||
| JP2008205005A | 2008-09-04 |
Foreign References:
| WO2016098966A1 | 2016-06-23 |
Attorney, Agent or Firm:
Patent business corporation r&c