A manufacturing method of a detailed structure - Nippon Telegraph and Telephone Corporation

Title:

A manufacturing method of a detailed structure

Document Type and Number:

Japanese Patent JP5956299

Kind Code:

B2

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Inventors:

Kazuhiko Takagawara
Kazuyoshi Ono
Kei Kuwahara
Tomomi Sakata
God lover

Application Number:

JP2012219223A

Publication Date:

July 27, 2016

Filing Date:

October 01, 2012

Export Citation:

Assignee:

Nippon Telegraph and Telephone Corporation

International Classes:

B81C1/00; H01L21/3065

Domestic Patent References:

Foreign References:

US20050118829

Attorney, Agent or Firm:

Masaki Yamakawa
Shigeki Yamakawa
Yuzo Koike

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