Title:
静電容量型電気機械変換装置の製造方法
Document Type and Number:
Japanese Patent JP5859049
Kind Code:
B2
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Inventors:
Yoshiki Zaitsu
Kazushige Fujii
Takehiko Kawasaki
Kazushige Fujii
Takehiko Kawasaki
Application Number:
JP2014067622A
Publication Date:
February 10, 2016
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R19/00; H04R31/00
Domestic Patent References:
JP2007181190A | ||||
JP2003163998A | ||||
JP2003102097A | ||||
JP2009124318A | ||||
JP2001231099A |
Foreign References:
US20070128758 | ||||
US20030063762 | ||||
US20100117124 | ||||
US6870937 |
Attorney, Agent or Firm:
Kazuo Kato