A manufacturing method of an electromagnetic wave element - National University Corporation Tokyo University

Title:

A manufacturing method of an electromagnetic wave element

Document Type and Number:

Japanese Patent JP6057271

Kind Code:

B2

Inventors:

Isao Shimoyama
Kiyoshi Matsumoto
Tomoyuki Takahata
Tetsuro Kan
Yusuke Takei
Kentaro Noda
Karaki Koichi
Yasuo Sasaki
Cheap food Yoshiharu
Takuya Tsukagoshi

Application Number:

JP2011154254A

Publication Date:

January 11, 2017

Filing Date:

July 12, 2011

Export Citation:

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Assignee:

National University Corporation Tokyo University
Olympus Endo Technology America Inc.

International Classes:

G02B1/00; G02B3/00; G02B13/00; H01L27/14

Domestic Patent References:

JP2009102219A
JP2009145542A
JP2009544805A

Foreign References:

US20070171534

Attorney, Agent or Firm:

Kenji Sugimura
Groundwork Kenichi
Tsubouchi Shin

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