Title:
電子装置及び電子装置の製造方法
Document Type and Number:
Japanese Patent JP6461030
Kind Code:
B2
Abstract:
According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.
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Inventors:
Akira Fujimoto
Naofumi Nakamura
Tamio Ikehashi
Naofumi Nakamura
Tamio Ikehashi
Application Number:
JP2016051228A
Publication Date:
January 30, 2019
Filing Date:
March 15, 2016
Export Citation:
Assignee:
Toshiba Corporation
Toshiba Electronic Devices & Storage Corporation
Toshiba Electronic Devices & Storage Corporation
International Classes:
B81C1/00; B81B7/02; H01G5/16; H01G7/00; H01L23/02
Domestic Patent References:
| JP10070287A | ||||
| JP2008062319A | ||||
| JP2008114354A | ||||
| JP10111189A | ||||
| JP10111195A | ||||
| JP10281862A | ||||
| JP2005517546A | ||||
| JP2007523758A | ||||
| JP2016540392A | ||||
| JP2010034580A |
Foreign References:
| US7381583 | ||||
| US20100032775 |
Attorney, Agent or Firm:
Suzue International Patent Office