Title:
圧電アクチュエータおよび圧電アクチュエータの製造方法
Document Type and Number:
Japanese Patent JPWO2011132532
Kind Code:
A
Inventors:
Yamamoto Meditation
Teiji Yamamoto
掘露 Italian 保龍
Teiji Yamamoto
掘露 Italian 保龍
Application Number:
JP2011058697W
Publication Date:
July 18, 2013
Filing Date:
April 06, 2011
Export Citation:
Assignee:
Murata Manufacturing Co., Ltd.
International Classes:
H01L41/09; H01H57/00; H01L41/187; H02N2/00; H01L41/18; H01L41/22
Attorney, Agent or Firm:
Patent business corporation Kaede Patent Attorneys' Office