Title:
MANUFACTURING METHOD FOR LIQUID INJECTION HEAD
Document Type and Number:
Japanese Patent JP2018034305
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid injection head suppressing sagging of an opening of an individual communication passage.SOLUTION: A manufacturing method for a liquid injection head includes: a through-hole forming step of forming a through-hole (72) in a substrate (24); and a flow passage space forming step of exposing the substrate (24) to etching liquid in a state of forming a first mask layer (63) on a first surface (51) of the substrate (24) and forming a second mask layer (68) on a second surface (52) of the substrate (24), recessing the substrate (24) from the first surface (51) thereof to the middle in a plate thickness direction and forming a flow passage space (39). In the flow passage space forming step, by exposing the substrate (24) to the etching liquid in a state of forming a mask opening (69') being wider than an opening area at a second surface (52) side of the through-hole (72) on the second mask layer (68) and including an opening of the through-hole (72), a flow passage cross-sectional area of the through-hole (72) is widened and an individual communication passage (26) is formed.SELECTED DRAWING: Figure 10
Inventors:
NAGANUMA YOICHI
TAKABE HONKI
MATSUMOTO YASUYUKI
ASADA KOJI
TAKABE HONKI
MATSUMOTO YASUYUKI
ASADA KOJI
Application Number:
JP2016166547A
Publication Date:
March 08, 2018
Filing Date:
August 29, 2016
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/16; B41J2/14
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai