Title:
Functional coating, immersion member, immersion member manufacturing method, exposure equipment, and device manufacturing method
Document Type and Number:
Japanese Patent JP6332038
Kind Code:
B2
Inventors:
Kishi Meiko
Yusuke Taki
Yusuke Taki
Application Number:
JP2014558589A
Publication Date:
May 30, 2018
Filing Date:
January 22, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
C23C14/06; G03F7/38
Domestic Patent References:
| JP2009504919A |
Foreign References:
| WO2011081062A1 | ||||
| WO2011138967A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Tadashi Takahashi