Title:
多段ナノホールアレイ金属膜の製造方法及び同膜構造によって支持されたガス/イオン種選択性膜の製造方法
Document Type and Number:
Japanese Patent JP4879883
Kind Code:
B2
Abstract:
An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.
Inventors:
Kang, Sang Kyun
Park, Yong-Il
Prints, Frederick Bee
Cha, Sak-won
Yuji Saito
Farvid, Ali
Sue, Pay-Shen
Park, Yong-Il
Prints, Frederick Bee
Cha, Sak-won
Yuji Saito
Farvid, Ali
Sue, Pay-Shen
Application Number:
JP2007506490A
Publication Date:
February 22, 2012
Filing Date:
March 30, 2005
Export Citation:
Assignee:
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
International Classes:
B01D71/02; B01D53/22; B01D67/00; B01D69/00; B01D69/02; B01D69/10; B01D69/12; B01J23/42; B01J35/10; B01J37/02; B01J37/34; H01M4/86; H01M4/88; H01M4/92; H01M8/10
Domestic Patent References:
| JP2002355537A |
Attorney, Agent or Firm:
Yoichi Oshima