A manufacturing method of a grain, a manufacturing method of slurry, and a manufacturing method of polish liquid

Title:

A manufacturing method of a grain, a manufacturing method of slurry, and a manufacturing method of polish liquid

Document Type and Number:

Japanese Patent JP5987905

Kind Code:

B2

Abstract:

A method for manufacturing an abrasive grain, comprising a step of obtaining a particle including a hydroxide of a tetravalent metal element by mixing a metal salt solution comprising a salt of the tetravalent metal element with an alkali liquid, wherein a temperature of a mixed liquid of the metal salt solution and the alkali liquid is 30° C. or more.

Inventors:

Tomohiro Iwano
Kuki Minami
Toshiaki Akutsu
Fujisaki Koji

Application Number:

JP2014516709A

Publication Date:

September 07, 2016

Filing Date:

March 26, 2013

Export Citation:

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