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Title:
熱型赤外線センサ、及び熱型赤外線センサの製造方法
Document Type and Number:
Japanese Patent JP5760297
Kind Code:
B2
Abstract:

To improve detection sensitivity of a thermal infrared sensor by increasing an infrared absorption rate of an infrared-absorbing layer.

This thermal infrared sensor includes: an infrared-receiving section 11; and an infrared-absorbing film held through a hollow section on a circuit board 1 for transmitting heat acquired by thermally converting incident infrared rays to the infrared-receiving section 11. A projecting section or a recessed section having a width which is larger than the film thickness of the infrared-absorbing film, and less than ten times the film thickness is formed on an infrared-incident surface of the infrared-absorbing film and on a transmission surface on the hollow section side which is the rear surface of the incident surface.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Tomoko Shimomura
Miyoshi Masaru
Kurashina Haruji
Application Number:
JP2009054227A
Publication Date:
August 05, 2015
Filing Date:
March 06, 2009
Export Citation:
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Assignee:
NEC
International Classes:
G01J1/02; G01J5/48; H01L27/144; H01L37/02
Domestic Patent References:
JP2001215151A
JP2004521329A
JP2005191982A
JP2008241438A
JP2003294523A
JP2006226891A
JP2004340719A
JP2002071452A
JP2003337066A
Attorney, Agent or Firm:
Minoru Kudo