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Title:
A manufacturing method of an imprint mold
Document Type and Number:
Japanese Patent JP5937929
Kind Code:
B2
More Like This:
JP2005161530MANUFACTURING METHOD OF EMBOSSING MOLD AND EMBOSSED SHEET
JP2014120526PATTERN FORMATION METHOD AND METHOD FOR MANUFACTURING TEMPLATE FOR IMPRINTING
Inventors:
Hiroyuki Hirano
Toshiaki Inoue
Application Number:
JP2012193818A
Publication Date:
June 22, 2016
Filing Date:
September 04, 2012
Export Citation:
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Assignee:
Fujikura Ltd.
International Classes:
B29C59/02; B29C33/38; H01L21/027
Domestic Patent References:
JP200471587A
JP201230475A
JP2004209971A
JP2007320246A
Attorney, Agent or Firm:
Eternal patent business corporation



 
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