Title:
Manufacturing method of semiconductor equipment and laser annealing equipment
Document Type and Number:
Japanese Patent JP6338512
Kind Code:
B2
Inventors:
Naoki Wakabayashi
Application Number:
JP2014232290A
Publication Date:
June 06, 2018
Filing Date:
November 17, 2014
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/265; H01L21/268; H01L21/336; H01L29/739; H01L29/78
Domestic Patent References:
| JP2013258288A | ||||
| JP2014036110A | ||||
| JP2007123300A | ||||
| JP2000021776A |
Attorney, Agent or Firm:
Mikio Kuruyama